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Title: Micromachined optical fiber current sensor
Authors: López Heredero, R.
Fernández de Caleya, R. F.
Guerrero, H.
Los Santos, P.
Cruz Acero, M.
Esteve, J.
Keywords: Optical Fibers;Pressure Sensors
Issue Date: 1-Sep-1999
Publisher: OSA (The Optical Society) Publishing
DOI: 10.1364/AO.38.005298
Published version:
Citation: Applied Optics 38(25): 5298-5305(1999)
Abstract: We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 µm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometry with an optical fiber low-finesse Fabry–Perot microcavity. A measurement range of 0–70 A and a minimum detectable intensity of 20 mA were obtained when distance D between the membrane and the electrical power line was 5 mm. The output signal directly shows a linear response with distance D.
E-ISSN: 2155-3165
ISSN: 1559-128X
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