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Title: In situ MEMS gradiometer with nanometer-resolution optical detection system
Authors: Campanella, H.
Del Real, R. P.
Duch, M.
Serre, C.
Lucas, I.
De Manuel, V.
Guerrero, H.
Esteve, J.
Díaz Michelena, M.
Plaza, J. A.
Keywords: Magnetic transducers;Gradiometers;Magnetic devices;MEMS Sensors
Issue Date: 5-Apr-2010
Publisher: Elsevier
DOI: 10.1016/j.sna.2010.02.007
Published version:
Citation: Sensors and Actuators A: Physical 159(1): 33-40(2010)
Abstract: Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers.
ISSN: 9244247
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