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12-Sep-2010
Resonance frequency dependence on out-of-plane forces for square silicon membranes: Applications to a MEMS gradiometer
Lucas, I.
;
Del Real, R. P.
;
Díaz Michelena, M.
;
De Manuel, V.
;
Duch, M.
;
Esteve, J.
;
Plaza, J. A.
10-Sep-2010
Resonance frequency dependence on out-of-plane forces for square silicon membranes: Applications to a MEMS gradiometer
Lucas, I.
;
Del Real, R. P.
;
Díaz Michelena, M.
;
De Manuel, V.
;
Duch, M.
;
Esteve, J.
;
Plaza, J. A.