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dc.rights.licenseCopyright © 2009, American Chemical Society-
dc.contributor.authorCampanella, H.-
dc.contributor.authorDel Real, R. P.-
dc.contributor.authorDíaz Michelena, M.-
dc.contributor.authorDuch, M.-
dc.contributor.authorGuerrero, H.-
dc.contributor.authorEsteve, J.-
dc.contributor.authorPlaza, J. A.-
dc.date.accessioned2022-02-17T09:23:43Z-
dc.date.available2022-02-17T09:23:43Z-
dc.date.issued2009-02-16-
dc.identifier.citationACS Applied Materials and Interfaces 1(3): 527-531(2009)es
dc.identifier.issn1944-8244-
dc.identifier.urihttp://hdl.handle.net/20.500.12666/653-
dc.description.abstractA focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy.es
dc.language.isoenges
dc.publisherACS Publicationses
dc.subjectHard magnet nanofabricationes
dc.subjectFocused ion beames
dc.subjectThin-film bulkes
dc.subjectAcoustic wave resonatores
dc.titleFocused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applicationses
dc.typeinfo:eu-repo/semantics/articlees
dc.identifier.doi10.1021/am800205d-
dc.identifier.doihttps://pubs.acs.org/doi/10.1021/am800205d-
dc.identifier.e-issn1944-8252-
dc.description.peerreviewedPeerreviewes
dc.type.hasVersioninfo:eu-repo/semantics/publishedVersion-
dc.rights.accessRightsinfo:eu-repo/semantics/restrictedAccess-
dc.type.coarhttp://purl.org/coar/resource_type/c_6501-
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