Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12666/653
| Title: | Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applications |
| Authors: | Campanella, H. Del Real, R. P. Díaz Michelena, M. Duch, M. Guerrero, H. Esteve, J. Plaza, J. A. |
| Keywords: | Hard magnet nanofabrication;Focused ion beam;Thin-film bulk;Acoustic wave resonator |
| Issue Date: | 16-Feb-2009 |
| Publisher: | ACS Publications |
| DOI: | 10.1021/am800205d https://pubs.acs.org/doi/10.1021/am800205d |
| Citation: | ACS Applied Materials and Interfaces 1(3): 527-531(2009) |
| Abstract: | A focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy. |
| URI: | http://hdl.handle.net/20.500.12666/653 |
| E-ISSN: | 1944-8252 |
| ISSN: | 1944-8244 |
| Appears in Collections: | (Espacio) Artículos |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| acceso-restringido.pdf | 221,73 kB | Adobe PDF |  View/Open |
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