Please use this identifier to cite or link to this item:
http://hdl.handle.net/20.500.12666/638
| Title: | In situ MEMS gradiometer with nanometer-resolution optical detection system |
| Authors: | Campanella, H. Del Real, R. P. Duch, M. Serre, C. Lucas, I. De Manuel, V. Guerrero, H. Esteve, J. Díaz Michelena, M. Plaza, J. A. |
| Keywords: | Magnetic transducers;Gradiometers;Magnetic devices;MEMS Sensors |
| Issue Date: | 5-Apr-2010 |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.sna.2010.02.007 |
| Published version: | https://www.sciencedirect.com/science/article/abs/pii/S0924424710000701 |
| Citation: | Sensors and Actuators A: Physical 159(1): 33-40(2010) |
| Abstract: | Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers. |
| URI: | http://hdl.handle.net/20.500.12666/638 |
| ISSN: | 9244247 |
| Appears in Collections: | (Espacio) Artículos |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| acceso-restringido.pdf | 221,73 kB | Adobe PDF |  View/Open |
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