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dc.rights.licenseCopyright © 2010 Elsevier B.V. All rights reserved.-
dc.contributor.authorCampanella, H.-
dc.contributor.authorDel Real, R. P.-
dc.contributor.authorDuch, M.-
dc.contributor.authorSerre, C.-
dc.contributor.authorLucas, I.-
dc.contributor.authorDe Manuel, V.-
dc.contributor.authorGuerrero, H.-
dc.contributor.authorEsteve, J.-
dc.contributor.authorDíaz Michelena, M.-
dc.contributor.authorPlaza, J. A.-
dc.date.accessioned2022-02-16T12:41:57Z-
dc.date.available2022-02-16T12:41:57Z-
dc.date.issued2010-04-05-
dc.identifier.citationSensors and Actuators A: Physical 159(1): 33-40(2010)es
dc.identifier.issn9244247-
dc.identifier.otherhttps://www.sciencedirect.com/science/article/abs/pii/S0924424710000701-
dc.identifier.urihttp://hdl.handle.net/20.500.12666/638-
dc.description.abstractMechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers.es
dc.language.isoenges
dc.publisherElsevieres
dc.subjectMagnetic transducerses
dc.subjectGradiometerses
dc.subjectMagnetic deviceses
dc.subjectMEMS Sensorses
dc.titleIn situ MEMS gradiometer with nanometer-resolution optical detection systemes
dc.typeinfo:eu-repo/semantics/articlees
dc.identifier.doi10.1016/j.sna.2010.02.007-
dc.description.peerreviewedPeerreviewes
dc.type.hasVersioninfo:eu-repo/semantics/publishedVersion-
dc.rights.accessRightsinfo:eu-repo/semantics/restrictedAccess-
dc.type.coarhttp://purl.org/coar/resource_type/c_6501-
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