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http://hdl.handle.net/20.500.12666/638
| Título : | In situ MEMS gradiometer with nanometer-resolution optical detection system |
| Autor : | Campanella, H. Del Real, R. P. Duch, M. Serre, C. Lucas, I. De Manuel, V. Guerrero, H. Esteve, J. Díaz Michelena, M. Plaza, J. A. |
| Palabras clave : | Magnetic transducers;Gradiometers;Magnetic devices;MEMS Sensors |
| Fecha de publicación : | 5-abr-2010 |
| Editorial : | Elsevier |
| DOI: | 10.1016/j.sna.2010.02.007 |
| Versión del Editor: | https://www.sciencedirect.com/science/article/abs/pii/S0924424710000701 |
| Citación : | Sensors and Actuators A: Physical 159(1): 33-40(2010) |
| Resumen : | Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers. |
| URI : | http://hdl.handle.net/20.500.12666/638 |
| ISSN : | 9244247 |
| Aparece en las colecciones: | (Espacio) Artículos |
Ficheros en este ítem:
| Fichero | Descripción | Tamaño | Formato | |
|---|---|---|---|---|
| acceso-restringido.pdf | 221,73 kB | Adobe PDF |  Visualizar/Abrir |
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